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2024 Vol.34, Issue 5 Preview Page

Research Paper

Identification of Gas Mixture with the MEMS Sensor Arrays by a Pattern Recognition
Bum-Joon Kim1
,
Jung-Sik Kim1†
1Department of Materials Science and Engineering, University of Seoul, Seoul 02504, Republic of Korea
†Corresponding author E-Mail : jskim@uos.ac.kr (J.-S. Kim, Univ. Seoul)
27 May 2024. pp. 235-241
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Abstract

Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NOx), and two odor gases, ammonia (NH3) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and hybridized SnO2-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

Keywords
metal oxide semiconductor
gas sensor
sensor array
gas mixture
pattern recognition
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Information
  • Publisher :Materials Research Society of Korea
  • Publisher(Ko) :한국재료학회
  • Journal Title :Korean Journal of Materials Research
  • Journal Title(Ko) :한국재료학회지
  • Volume : 34
  • No :5
  • Pages :235-241
  • Received Date : 2024-03-26
  • Revised Date : 2024-04-22
  • Accepted Date : 2024-04-23
  • DOI :https://doi.org/10.3740/MRSK.2024.34.5.235
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