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2021 Vol.31, Issue 10 Preview Page
Enhancing Breakdown Strength and Energy Storage Efficiency of Glass-Pb(Zr,Ti)O3 Composite Film

유리-PZT 혼합 후막의 절연 파괴 전압 및 에너지 저장 효율 향상

Samjeong Kim
,
Ji-Ho Lim
,
Dae-Yong Jeong†
김 삼정
,
임 지호
,
정 대용†
Department of Materials Science and Engineering, Inha University, 100 Inha-ro, Michuhol-gu, Incheon 22212, Republic of Korea
인하대학교 신소재공학과
†Corresponding author E-Mail : dyjeong@inha.ac.kr (D.-Y. Jeong, Inha Uviv.)
October 2021. pp. 546-551
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Abstract

To improve ferroelectric properties of PZT, many studies have attempted to fabricate dense PZT films. The AD process has an advantage for forming dense ceramic films at room temperature without any additional heat treatment in low vacuum. Thick films coated by AD have a higher dielectric breakdown strength due to their higher density than those coated using conventional methods. To improve the breakdown strength, glass (SiO2-Al2O3-Y2O3, SAY) is mixed with PZT powder at various volume ratios (PZT-xSAY, x = 0, 5, 10 vol%) and coating films are produced on silicon wafers by AD method. Depending on the ratio of PZT to glass, dielectric breakdown strength and energy storage efficiency characteristics change. Mechanical impact in the AD process makes the SAY glass more viscous and fills the film densely. Compared to pure PZT film, PZT-SAY film shows an 87.5% increase in breakdown strength and a 35.3 % increase in energy storage efficiency.

Keywords
aerosol deposition
Pb(Zr,Ti)O3
glass
breakdown strength
energy storage efficiency
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Information
  • Publisher :Materials Research Society of Korea
  • Publisher(Ko) :한국재료학회
  • Journal Title :Korean Journal of Materials Research
  • Journal Title(Ko) :한국재료학회지
  • Volume : 31
  • No :10
  • Pages :546-551
  • Received Date : 2021-06-02
  • Revised Date : 2021-09-02
  • Accepted Date : 2021-09-02
  • DOI :https://doi.org/10.3740/MRSK.2021.31.10.546
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