Analysis of Properties Multi-Layered TiN/CrN Thin Films Deposited by AIP Method

Min-Sook Baek; Dong-Joo Yoon; Ki-Bok Heo; Byung-Il Kim

doi:10.3740/MRSK.2018.28.7.405

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Analysis of Properties Multi-Layered TiN/CrN Thin Films Deposited by AIP Method AIP법으로 증착된 TiN/CrN 다층박막의 특성 분석

July 2018. pp. 405-410

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Abstract

TiN and CrN thin films are among the most used coatings in machine and tool steels. TiN and CrN are deposited by arc ion plating(AIP) method. The AIP method inhibits the reaction by depositing a hard, protective coating on the material surface. In this study, the characteristics of multi-layer(TiN/CrN/TiN(TCT), CrN/TiN/CrN(CTC)) are investigated. For comparison, TiN with the same thickness as the multilayer is formed as a single layer and analyzed. Thin films formed as multilayers are well stacked. The characteristics of micro hardness and corrosion resistance are better than those of single layer TiN. The TiN/CrN peak is confirmed because both TCT and CTC are formed of the same component(TiN, CrN), and the phase is first grown in the (111) direction, which is the growth direction. However, the adhesion and abrasion resistance of the multilayer films are somewhat lower.

Keywords

AIP method

TiN

CrN

multi-layer

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Information

Publisher :Materials Research Society of Korea
Publisher(Ko) :한국재료학회
Journal Title :Korean Journal of Materials Research
Journal Title(Ko) :한국재료학회지
Volume : 28
No :7
Pages :405-410
Received Date : 2018-03-23
Revised Date : 2018-05-31
Accepted Date : 2018-06-10
DOI :https://doi.org/10.3740/MRSK.2018.28.7.405

Korean Journal of Materials Research ISSN:1225-0562(Print) 2287-7258(Online) 한국재료학회지

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