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2025 Vol.35, Issue 8 Preview Page

Research Paper

Effects of TiO2 Addition and Processing Variables on the Properties of Black Aluminum Nitride
Min-Kwon Park1
,
Sin-Il Go2
,
Kwang-Hee Han2
,
Sang-Jin Lee13†
1Department of Advanced Materials Science and Engineering, Mokpo National University, Muan 58554, Republic of Korea
2Research Institute of Ceramic Processing, HK Tech Co., Ltd., Mokpo 68618, Republic of Korea
3Research Institute of Ceramic Industry and Technology, Mokpo National University, Muan 58554, Republic of Korea
†Corresponding author E-Mail : lee@mokpo.ac.kr (S.-J. Lee, Mokpo Nat’l Univ.)
27 August 2025. pp. 345-351
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Abstract

Aluminum nitride (AlN) provides excellent thermal conductivity and electrical insulation, making it suitable for semiconductor heater applications. However, its low surface emissivity can lead to thermal energy loss, reducing heater efficiency. To address this issue, black AlN - obtained by doping with carbon and other impurities to enhance the surface emissivity - has recently been applied in various fields. In this study, black AlN was fabricated by adding TiO2 to AlN, and its densification behavior and electrical properties were evaluated to assess the feasibility of its use as a heater material for semiconductor photolithography. The sinterability of black AlN was improved by optimizing the granulation and forming conditions, with a particular focus on the heat treatment parameters that affect material properties such as color. Consequently, a black AlN heater material with a sintered density of 3.33 g/cm3, thermal conductivity of 162.7 W/m･K, and thermal diffusivity of 64.22 mm2/s was fabricated by optimizing the processing variables.

Keywords
black aluminum nitride
TiO2
spray drying
thermal conductivity
aluminum nitride heater
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Information
  • Publisher :Materials Research Society of Korea
  • Publisher(Ko) :한국재료학회
  • Journal Title :Korean Journal of Materials Research
  • Journal Title(Ko) :한국재료학회지
  • Volume : 35
  • No :8
  • Pages :345-351
  • Received Date : 2025-05-26
  • Revised Date : 2025-07-13
  • Accepted Date : 2025-08-04
  • DOI :https://doi.org/10.3740/MRSK.2025.35.8.345
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