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2018 Vol.28, Issue 11 Preview Page
Residue Free Fabrication of Suspended 2D Nanosheets for in-situ TEM Nanomechanics
Rakesh Sadanand Sharbidre12
,
Ji Cheol Byen1
,
Gyeong Yeol Yun1
,
Jae-Kyung Ryu5
,
Chang Jun Lee23
,
Seong-Gu Hong24
,
Sachin Bramhe1
,
Taik Nam Kim1†
1Department of Material Science Engineering, Paichai University, Daejeon 35345, Republic of Korea
2Division of Industrial Metrology, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
3School of Mechanical Engineering, Chonnam National University, Gwangju 61186, Republic of Korea
4Department of Nano Science, University of Science and Technology, Daejeon 34054, Republic of Korea
5Department of Dental Technology and Science, ShinHan University, Gyeonggi-do 11644, Republic of Korea
†Corresponding author E-Mail : tnkim@pcu.ac.kr (T. N. Kim, Paichai Univ.)
November 2018. pp. 627-632
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Abstract

Two dimensional(2D) crystals, composed of a single layer or a few atomic layers extracted from layered materials are attracting researchers’ interest due to promising applications in the nanoelectromechanical systems. Worldwide researchers are preparing devices with suspended 2D materials to study their physical and electrical properties. However, during the fabrication process of 2D flakes on a target substrate, contamination occurs, which makes the measurement data less reliable. We propose a dry transfer method using poly-methyl methacrylate(PMMA) for the 2D flakes to transfer onto the targeted substrate. The PMMA is then removed from the device by an N-Methyl-2-pyrrolidone solution and a critical point dryer, which makes the suspended 2D flakes residue free. Our method provides a clean, reliable and controllable way of fabricating micrometer-sized suspended 2D nanosheets.

Keywords
graphene
molybdenum disulphide
suspended nanosheet
dry transfer
poly-methyl methacrylate
References
1.
M. C. Hersam and B. J. LeRoy, APL Mater., 2, 092201 (2014). 10.1063/1.4893496
2.
S. Das , J. A. Robinson, M. Dubey, H. Terrones, and M. Terrones, Annu. Rev. Mater. Res., 45, 1 (2015). 10.1146/annurev-matsci-070214-021034
3.
A. K. Geim and K.S. Novoselov, Nat. Mater., 6, 183 (2007). 10.1038/nmat184917330084
4.
A. K. Geim , Science, 324, 1530 (2009). 10.1126/science.115887719541989
5.
F. Xia , D. B. Farmer, Y. Lin and P. Avouris, Nano Lett., 10, 715 (2010). 10.1021/nl903963620092332
6.
M. Chen , R.C. Haddon, R. Yan, and E. Bekyarova, Mater. Horiz., 4, 1054 (2017). 10.1039/C7MH00485K
7.
A. C. Ferrari , F. Bonaccorso, V. Fal'ko, K. S. Novoselov, S. Roche, P Bøggild, S. Borini, F. H. L. Koppens, V. Palermo, N. Pugno, J. A. Garrido, R. Sordan, A. Bianco, L. Ballerini, M. Prato, E. Lidorikis, J. Kivioja, C. Marinelli, T. Ryhänen, A. Morpurgo, J. N. Coleman, V. Nicolosi, L Colombo, A. Fert, M. G.-Hernandez, A. Bachtold, G. F. Schneider, F. Guinea, C. Dekker, M. Barbone, Z. Sun, C. Galiotis, A. N. Grigorenko, G. Konstantatos, A. Kis, M. Katsnelson, L. Vandersypen, A. Loiseau, V. Morandi, D. Neumaier, E. Treossi, V. Pellegrini, M. Polini, A. Tredicucci, G. M. Williams, B. H. Hong, J.-H. Ahn, J. M. Kim, H. Zirath, B. J. van Wees, H. van der Zant, L. Occhipinti, A. D. Matteo, I. A. Kinloch, T. Seyller, E. Quesnel, X. Feng, K. Teo, N. Rupesinghe, P. Hakonen, S. R. T. Neil, Q. Tannock, T.Löfwanderaq, and J. Kinaretba, Nanoscale, 7, 4598 (2015). 10.1039/C4NR01600A25707682
8.
J. H. Lee , D. W. Jang, S. G. Hong, B. C. Park, J. H. Kim, H. J. Jung, and S. B. Lee, Carbon, 118, 475 (2017). 10.1016/j.carbon.2017.03.081
9.
S. Wagner , C. Weisenstein, S. Kataria, and M. C. Lemme, in Proceedings of Micro and Nano Engineering At The Hague, 45, 57076 (2015).
10.
Z. Moktadir , Graphene, 2, 341 (2014). 10.1533/9780857099334.3.341
11.
T. Kuila , S. Bose, P. Khanra, A. K. Mishra, N. H. Kim, J. H. Lee, Biosens. Bioelectron., 26, 4637 (2011). 10.1016/j.bios.2011.05.03921683572
12.
M. Pumera , Mater. Today, 14, 308 (2011). 10.1016/S1369-7021(11)70160-2
13.
T. Mahmoudi , Y. Wang, and Y. B. Hahn, Nano Energy, 47, 51 (2018). 10.1016/j.nanoen.2018.02.047
14.
Z. H. Khan , A. R. Kermany, A. Öchsner and F. Iacopi, J. Physics D: App. Phys., 50, 053003 (2017). 10.1088/1361-6463/50/5/053003
15.
K. S. Novoselov , Z. Jiang, Y. Zhang, S. V. Morozov, H. L. Stormer, U. Zeitler, J. C. Maan, G. S. Boebinger. P. Kim, and A. K. Geim, Science, 315, 1379 (2007). 10.1126/science.113720117303717
16.
A. H. Castro Neto , F. Guinea, N. M. R. Peres, K.S. Novoselov and A. K. Geim, Rev. Mod. Phys., 81, 109 (2009). 10.1103/RevModPhys.81.109
17.
H. J. Conley , B. Wang, J. I. Ziegler, R. F. Haglund Jr., S. T. Pantelides, and K. I. Bolotin, Nano Lett., 13, 3626 (2013). 10.1021/nl401474823819588
18.
A. Splendiani , L. Sun, Y. Zhang, T. Li, J. Kim, C.-Y. Chim, G. Galli, and F. Wang, Nano Lett., 10, 1271 (2010). 10.1021/nl903868w20229981
19.
S. Kim , A. Konar, W. S. Hwang, D. Jena, and W. Cho, Nat. Commun., 3, 1011 (2012). 10.1038/ncomms201822910357
20.
B. Radisavljevic , A. Radenovic, J. Brivio, V. Giacometti, and A. Kis, Nat. Nanotechnol., 6, 147 (2011). 10.1038/nnano.2010.27921278752
21.
I. W. Frank , D. M. Tanenbaum, A. M. van der Zande and P. L. McEuen, J. Vac. Sci. Technol., B: Microelectronics and Nanometer Structures, 25, 2558 (2007). 10.1116/1.2789446
22.
J. Y. Huang , L. Qi, and J. Li, Nano Research, 3, 43 (2010). 10.1007/s12274-010-1006-4
23.
M. Goldsche , G. J. Verbiest, T. Khodkov, J. Sonnta g, N. Driesch, D. Buca, and C. Stampfer, Nanotechnology, 29,(2018).
24.
A. Castellanos-Gomez , M. Poot, G. A. Steele, H. S. J. van der Zant, N. Agrait, and G. Rubio-Bollinger, Adv.Mater., 24, 772 (2012). 10.1002/adma.20110396522231284
25.
J. Brivio , D. T. L. Alexander, and A. Kis, Nano Lett., 11, 5148 (2011). 10.1021/nl202228822010987
26.
S. Bertolazzi , J. Brivio, and A. Kis, ACS Nano, 5, 9703 (2011). 10.1021/nn203879f22087740
27.
B. Jang , A. E. Mag-isa, J. H. Kim, B. W. Kim, H. J. Lee, C. S. Oh, T. Sumigawa, and T. Kitamura, Extreme Mech. Lett., 14, 10 (2017). 10.1016/j.eml.2016.11.001
28.
H. Park , Nanotechnology, 29, 415303 (2018). 10.1088/1361-6528/aad4d930028310
29.
M. Her , R. Beams, and L. Novotny, Phys. Lett., Section A: General, Atomic and Solid State Physics, 377, 1455(2013).
30.
C. Androulidakis , K. Zhang, M. Robertson, and S. Tawfick, 2D Materials, 5, 032005 (2018).
31.
Y. Naitou and S. Ogawa, Appl. Phys. Lett., 108, 171605 (2016). 10.1063/1.4948380
32.
G. Nanda , S. Goswami, K. Watanabe, T. Taniguchi, and P. F. A Alkemade, Nano Lett., 15, 4006 (2015). 10.1021/acs.nanolett.5b0093925965300
33.
H. Li , J. Wu, X. Huang, Z. Yin, J. Liu, and H. Zhang, ACS Nano, 8, 6563 (2014). 10.1021/nn501779y24954078
34.
R. Frisenda , E. Navarro-Moratalla, P. Gant, D. P. De Lara, P. Jarillo-Herrero, R. V. Gorbachevc, and A. Castellanos- Gomez, Chem. Soc. Rev., 47, 53 (2018) 10.1039/C7CS00556C29111548
35.
L. Yuan , J. Ge, X. Peng, Q. Zhang, Z. Wu, Y. Jian, X. Xiong, H. Yin, and J. Han, AIP Advances, 6, 125201 (2016). 10.1063/1.4967967
36.
Y. Huang , E. Sutter, N. N. Shi, J. Zheng, T. Yang, D. Englund, H.-J. Gao, and P. Sutter, ACS Nano, 9, 10612 (2015). 10.1021/acsnano.5b0425826336975
37.
R. S. Sharbidre , S. M. Park, C. J. Lee, B. C. Park, S.- G. Hong, S. Bramhe, G. Y. Yun, J.-K. Ryu and T. N. Kim, Korean J. Mater. Res., 27, 705 (2017).
38.
R. S. Sharbidre , C. J. Lee, S. G. Hong, J. Ryu, and T. N. Kim, Korean J. Mater. Res., 26, 704 (2016).
39.
C. Casiraghi , A. Hartschuh, E. Lidorikis, H. Qian, H. Harutyunyan, T. Gokus, K. S. Novoselov, and A. C. Ferrari, Nano Lett., 7, 2711 (2007). 10.1021/nl071168m17713959
40.
D. Graf , F. Molitor, K. Ensslin, C. Stampfer, A. Jungen, C. Hierold, and L. Wirtz, Nano lett., 7, 238 (2007). 10.1021/nl061702a17297984
41.
P. Zhang et al. , Nat. Commun., 5, 3782 (2014). 10.1038/ncomms478224777167
42.
B. Jang et al. , Nanoscale, 9, 17325 (2017). 10.1039/C7NR04443G29094137
43.
H. Kim , H. Yun, H. A. Yoon, and S. W. Lee, Adv. Energy Mater., 4, 1301973 (2014). 10.1002/aenm.201301973
Information
  • Publisher :Materials Research Society of Korea
  • Publisher(Ko) :한국재료학회
  • Journal Title :Korean Journal of Materials Research
  • Journal Title(Ko) :한국재료학회지
  • Volume : 28
  • No :11
  • Pages :627-632
  • Received Date : 2018-10-16
  • Revised Date : 2018-10-29
  • Accepted Date : 2018-10-31
  • DOI :https://doi.org/10.3740/MRSK.2018.28.11.627
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