Thermodynamic Prediction of TaC CVD Process in TaCl5-C3H6-H2 System

Hyun-Mi Kim; Kyoon Choi; Kwang-Bo Shim; Nam-Choon Cho; Jong-Kyoo Park

doi:10.3740/MRSK.2018.28.2.75

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2018 Vol.28, Issue 2 Next Page

Thermodynamic Prediction of TaC CVD Process in TaCl₅-C₃H₆-H₂ System TaCl₅-C₃H₆-H₂ 계에서 TaC CVD 공정의 열역학 해석

February 2018. pp. 75-81

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Abstract

An ultra-high temperature ceramic, tantalum carbide, has received much attention for its favorable characteristics: a superior melting point and chemical compatibility with carbon and other carbides. One drawback is the high temperature erosion of carbon/carbon (C/C) composites. To address this drawback, we deposited TaC on C/C with silicon carbide as an intermediate layer. Prior to the TaC deposition, the TaCl₅-C₃H₆-H₂ system was thermodynamically analyzed with FactSage 6.2 and compared with the TaCl₅-CH₄-H₂ system. The results confirmed that the TaCl₅-C₃H₆-H₂ system had a more realistic cost and deposition efficiency than TaCl₅-CH₄-H₂. A dense and uniform TaC layer was successfully deposited under conditions of Ta/C = 0.5, 1200 °C and 100 torr. This study verified that the thermodynamic analysis is appropriate as a guide and prerequisite for carbide deposition.

Keywords

tantalum carbide

erosion of C/C composite

thermodynamic analysis

chemical vapor deposition

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Information

Publisher :Materials Research Society of Korea
Publisher(Ko) :한국재료학회
Journal Title :Korean Journal of Materials Research
Journal Title(Ko) :한국재료학회지
Volume : 28
No :2
Pages :75-81
Received Date : 2017-11-20
Revised Date : 2017-11-29
Accepted Date : 2017-11-30
DOI :https://doi.org/10.3740/MRSK.2018.28.2.75

Korean Journal of Materials Research ISSN:1225-0562(Print) 2287-7258(Online) 한국재료학회지

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