Plasma Resistant Highly Densified Yttria Ceramics Prepared via Dehydration Treatment of Raw Powders

Jae-Hyeon Cho; Jin-Sam Choi

doi:10.3740/MRSK.2025.35.12.582

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2025 Vol.35, Issue 12 Preview Page Next Page

Research Paper

Plasma Resistant Highly Densified Yttria Ceramics Prepared via Dehydration Treatment of Raw Powders

27 December 2025. pp. 582-588

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Abstract

This study identifies the crystalline defects commonly observed in conventional yttria ceramics, and proposes a processing route to produce highly densified yttria without the use of sintering aids. The primary objective is to obtain a dense yttria monolith with optimized microstructure and enhanced functional properties. The sintering behavior, mechanical performance, and plasma etching resistance of the yttria specimens were systematically analyzed as a function of the initial powder characteristics. A three-step sintering protocol was employed to suppress abnormal grain growth, yielding fully densified ceramics with uniform and controlled grain size distribution. Calcination of the yttria powder at 1,250 °C for 48 h effectively eliminated oxygen deficiencies and minimized hydration effects. The duration and temperature of each sintering stage significantly influenced grain evolution, which was reflected in the variations in Vickers hardness, Young’s modulus, and fracture toughness (K_IC). The resulting yttria ceramics exhibited superior plasma resistance compared with Al₂O₃, ZrO₂, quartz, and Si wafer, demonstrating markedly reduced weight loss during plasma etching. These findings highlight the critical role of proper initial powder treatment and precisely controlled sintering kinetics for achieving yttria monoliths with enhanced densification, mechanical integrity, and plasma erosion resistance. This work provides a practical route for high performance yttria ceramics, offering enhanced densification, structural stability, and the reliability necessary for integration into advanced systems exposed to harsh plasma environments.

Keywords

calcination

yttria

fused yttria

full density

plasma resistance

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Information

Publisher :Materials Research Society of Korea
Publisher(Ko) :한국재료학회
Journal Title :Korean Journal of Materials Research
Journal Title(Ko) :한국재료학회지
Volume : 35
No :12
Pages :582-588
Received Date : 2025-11-12
Revised Date : 2025-12-12
Accepted Date : 2025-12-15
DOI :https://doi.org/10.3740/MRSK.2025.35.12.582

Korean Journal of Materials Research ISSN:1225-0562(Print) 2287-7258(Online) 한국재료학회지

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