Comparative Analysis of Commercial Al2O3 Powders and the Dispersion Characteristics of Slurries Produced Using Them

Mo-Se Kwon; Seung-Joon Yoo; Jin-Ho Kim; Kyoung-Hoon Jeong; Jong-Keun Lee; Ung-Soo Kim

doi:10.3740/MRSK.2024.34.1.27

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2024 Vol.34, Issue 1 Preview Page Next Page

Research Paper

Comparative Analysis of Commercial Al₂O₃ Powders and the Dispersion Characteristics of Slurries Produced Using Them 상용 Al₂O₃ 분말의 비교분석 및 이를 이용하여 제조한 슬러리의 분산 특성

27 January 2024. pp. 27-33

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Abstract

Al₂O₃ has excellent sintering properties and is important in semiconductor manufacturing processes that require high-temperature resistance and chemical inertness in a plasma environment. In this study, a comprehensive analysis of the chemical characteristics, physical properties, crystal structure, and dispersion stability of three commercially available Al₂O₃ powders was conducted. The aim was to provide a technological foundation for selecting and utilizing appropriate Al₂O₃ powders in practical applications. All powders exhibited α-Al₂O₃ as the main phase, with the presence of beta-phase Na₂O-11Al₂O₃ as the secondary phase. The highest Na⁺ ion leaching was observed in the aqueous slurry state due to the presence of the secondary phase. Although the average particle size difference among the three powders was not significant, distinct differences in particle size distribution were observed. ALG-1SH showed a broad particle size distribution, P162 exhibited a bimodal distribution, and AES-11 displayed a uniform unimodal distribution. High-concentration Al₂O₃ slurries showed differences in viscosity due to ion release when no dispersant was added, affecting the electrical double-layer thickness. Polycarboxylate was found to effectively enhance the dispersion stability of all three powders. In the dispersion stability analysis, ALG-1SH exhibited the slowest sedimentation tendency, as evidenced by the low TSI value, while P162 showed faster precipitation, influenced by the particle size distribution.

Keywords

Al₂O₃

powder characteristics

slurry

viscosity

sedimentation behavior

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Information

Publisher :Materials Research Society of Korea
Publisher(Ko) :한국재료학회
Journal Title :Korean Journal of Materials Research
Journal Title(Ko) :한국재료학회지
Volume : 34
No :1
Pages :27-33
Received Date : 2023-10-24
Revised Date : 2023-11-27
Accepted Date : 2023-11-27
DOI :https://doi.org/10.3740/MRSK.2024.34.1.27

Korean Journal of Materials Research ISSN:1225-0562(Print) 2287-7258(Online) 한국재료학회지

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