Effect of Glass Frit Addition on Characteristics of Yttria Ceramics

Ji-Sun Lee; Sunwoog Kim; Mu-Kun Roh; Chang-Yong Oh; Jinho Kim

doi:10.3740/MRSK.2024.34.6.303

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2024 Vol.34, Issue 6 Preview Page Next Page

Research Paper

Effect of Glass Frit Addition on Characteristics of Yttria Ceramics 이트리아 소결체의 특성에 글라스프릿 첨가가 미치는 영향

27 June 2024. pp. 303-308

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Abstract

The semiconductor and display industries require the development of plasma resistant materials for use in high density plasma etching process equipment. Yttria (Y₂O₃) is a ceramic material mainly used to ensure good plasma resistance properties, which requires a dense microstructure. In commercial production, a sintering process is applied to reduce the sintering temperature of Y₂O₃. In this study, the effect of the addition of glass frit to the sintered specimen was examined when manufacturing yttria sintered specimens for semiconductor process equipment parts. The Y₂O₃ specimen was shaped into a Ø50 mm size and then sintered at 1,600 °C for 1~8 h. The characteristics, X-ray diffraction pattern, densities, contraction rate of the specimen, and swelling of the surface of the Y₂O₃ specimens were investigated as a function of the sintering time and glass frit addition. The Y₂O₃ specimen exhibited a density of over 4.9 g/cm³ as the sintering time increased, and the swelling phenomenon characteristics were improved by glass frit, by controlling particle size.

Keywords

yttria ceramic

sintering

glass frit

density

glass transition temperature

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Information

Publisher :Materials Research Society of Korea
Publisher(Ko) :한국재료학회
Journal Title :Korean Journal of Materials Research
Journal Title(Ko) :한국재료학회지
Volume : 34
No :6
Pages :303-308
Received Date : 2024-04-18
Revised Date : 2024-05-15
Accepted Date : 2024-05-28
DOI :https://doi.org/10.3740/MRSK.2024.34.6.303

Korean Journal of Materials Research ISSN:1225-0562(Print) 2287-7258(Online) 한국재료학회지

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