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2017 Vol.27, Issue 12 Preview Page
Characterization of Highly Conducting ZnMgBeGaO/Ag/ZnMgBeGaO Transparent Conductive Multilayer Films with UV Energy Bandgap
Ngoc Minh Le
,
Ba Cuong Hoang
,
Byung-Teak Lee†
Photonic and Electronic Thin Film Laboratory, Department of Materials Science and Engineering, Chonnam National University, 300 Yong-bong dong, Gwangju 61186, Republic of Korea
†Corresponding author : btlee@jnu.ac.kr (B.-T. Lee, Chonnam Nat’l Univ.)
December 2017. pp. 695-698
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Abstract

ZnMgBeGaO/Ag/ZnMgBeGaO multilayer structures were sputter grown and characterized in detail. Results indicated that the electrical properties of the ZnMgBeGaO films were significantly improved by inserting an Ag layer with proper thickness (~ 10 nm). Structures with thicker Ag films showed much lower optical transmission, although the electrical conductivity was further improved. It was also observed that the electrical properties of the multilayer structure were sizably improved by annealing in vacuum (~35% at 300 °C). The optimum ZnMgBeGaO(20nm)/Ag(10nm)/ZnMgBeGaO(20nm) structure exhibited an electrical resistivity of ~2.6 × 10−5 Ωcm (after annealing), energy bandgap of ~3.75 eV, and optical transmittance of 65%~ 95 % over the visible wavelength range, representing a significant improvement in characteristics versus previously reported transparent conductive materials.

Keywords
ZnO
transparent conducting oxides
UV wavelength
multilayer
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Information
  • Publisher :Materials Research Society of Korea
  • Publisher(Ko) :한국재료학회
  • Journal Title :Korean Journal of Materials Research
  • Journal Title(Ko) :한국재료학회지
  • Volume : 27
  • No :12
  • Pages :695-698
  • Received Date : 2017-09-27
  • Revised Date : 2017-11-27
  • Accepted Date : 2017-11-27
  • DOI :https://doi.org/10.3740/MRSK.2017.27.12.695
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