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2017 Vol.27, Issue 6 Preview Page
Influence of Electron Beam Irradiation on the Electrical and Optical Properties of InGaZnO Thin Film Transistor

InGaZnO 박막 트랜지스터의 전기 및 광학적 특성에 대한 전자빔 조사의 영향

In-Hwan Cho12
,
Hai-Woong Park2
,
Chan-Joong Kim1
,
Byung-Hyuk Jun1†
조 인환12
,
박 해웅2
,
김 찬중1
,
전 병혁1†
1Neutron Utilization Research Division, Korea Atomic Energy Research Institute, Daejeon 34057, Republic of Korea
2Department of Energy Materials and Chemical Engineering, Korea University of Technology and Education, Cheonan 31253, Republic of Korea
1한국원자력연구원 중성자응용연구부
2한국기술교육대학교 에너지신소재화학공학부
†Corresponding author E-Mail : bhjun@kaeri.re.kr (B.-H. Jun, KAERI)
June 2017. pp. 345-349
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Abstract

The effects of electron beam(EB) irradiation on the electrical and optical properties of InGaZnO(IGZO) thin films fabricated using a sol-gel process were investigated. As the EB dose increased, the electrical characteristic of the IGZO TFTs changed from semiconductor to conductor, and the threshold voltage values shifted to the negative direction. X-ray photoelectron spectroscopy analysis of the O 1s core level showed that the relative area of oxygen vacancies increased from 14.68 to 19.08 % as the EB dose increased from 0 to 1.5 × 1016 electrons/cm2. In addition, spectroscopic ellipsometer analysis showed that the optical band gap varied from 3.39 to 3.46 eV with increasing EB dose. From the result of band alignment, it was confirmed that the Fermi level(EF) of the sample irradiated with 1.5 × 1016 electrons/cm2 was located at the closest position to the conduction band minimum(CBM) due to the increase of electron carrier concentration.

Keywords
InGaZnO film
oxide semiconductor
electron beam irradiation
electrical property
optical property
oxygen vacancy
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Information
  • Publisher :Materials Research Society of Korea
  • Publisher(Ko) :한국재료학회
  • Journal Title :Korean Journal of Materials Research
  • Journal Title(Ko) :한국재료학회지
  • Volume : 27
  • No :6
  • Pages :345-349
  • Received Date : 2017-03-01
  • Revised Date : 2017-04-05
  • Accepted Date : 2017-04-05
  • DOI :https://doi.org/10.3740/MRSK.2017.27.6.345
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