:: Korean Journal of Materials Research ::

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Heat Treatment of Carbonized Photoresist Mask with Ammonia for Epitaxial Lateral Overgrowth of a-plane GaN on R-plane Sapphire

Dae-sik Kim, Jun-hyuck Kwon, Junggeun Jhin, Dongjin Byun

Korean Journal of Materials Research :: Vol.28 No.4 pp.208-213

DOI:https://doi.org/10.3740/MRSK.2018.28.4.208
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