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ISSN : 1225-0562(Print)
ISSN : 2287-7258(Online)
Korean Journal of Materials Research Vol.28 No.11 pp.627-632
DOI : https://doi.org/10.3740/MRSK.2018.28.11.627

Residue Free Fabrication of Suspended 2D Nanosheets for in-situ TEM Nanomechanics

Rakesh Sadanand Sharbidre1,2, Ji Cheol Byen1, Gyeong Yeol Yun1, Jae-Kyung Ryu5,Chang Jun Lee2,3, Seong-Gu Hong2,4, Sachin Bramhe1, Taik Nam Kim1†
1Department of Material Science Engineering, Paichai University, Daejeon 35345, Republic of Korea
2Division of Industrial Metrology, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
3School of Mechanical Engineering, Chonnam National University, Gwangju 61186, Republic of Korea
4Department of Nano Science, University of Science and Technology, Daejeon 34054, Republic of Korea
5Department of Dental Technology and Science, ShinHan University, Gyeonggi-do 11644, Republic of Korea
Corresponding author
E-Mail : tnkim@pcu.ac.kr (T. N. Kim, Paichai Univ.)

Abstract

Two dimensional(2D) crystals, composed of a single layer or a few atomic layers extracted from layered materials are attracting researchers’ interest due to promising applications in the nanoelectromechanical systems. Worldwide researchers are preparing devices with suspended 2D materials to study their physical and electrical properties. However, during the fabrication process of 2D flakes on a target substrate, contamination occurs, which makes the measurement data less reliable. We propose a dry transfer method using poly-methyl methacrylate(PMMA) for the 2D flakes to transfer onto the targeted substrate. The PMMA is then removed from the device by an N-Methyl-2-pyrrolidone solution and a critical point dryer, which makes the suspended 2D flakes residue free. Our method provides a clean, reliable and controllable way of fabricating micrometer-sized suspended 2D nanosheets.

초록

 

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