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ISSN : 1225-0562(Print)
ISSN : 2287-7258(Online)
Korean Journal of Materials Research Vol.15 No.11 pp.741-744
DOI :

Effects of Substrate Temperature on the Microstructure and Photoluminescence Properties of ZnO Thin Films by Atomic Layer Deposition

Lim, Jong-Min, Lee, Chong-Mu

Abstract


ZnO 성장을 위한 Atomic Layer Deposition법에서 공정온도가 박막의 구조적 및 광학적 특성에 미치는 영향

임종민, 이종무

초록