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ISSN : 1225-0562(Print)
ISSN : 2287-7258(Online)
Korean Journal of Materials Research Vol.14 No.3 pp.163-167
DOI :

Oxidation Rates of TiAlLaN Thin Films Deposited by Ion Plating

Seo, Sung Man, Lee, Kee Sun, Lee, Kee-Ahn

Abstract


이온플레이팅법으로 제조된 TiAlLaN계 박막의 산화속도

서성만, 이기선, 이기안

초록