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ISSN : 1225-0562(Print)
ISSN : 2287-7258(Online)
Korean Journal of Materials Research Vol.12 No.6 pp.493-498

Physical Properties of the Al2O3 Thin Films Deposited by Atomic Layer Deposition

Kim, Jae-Bum, Kwon, Duk-Ryel, Oh, Ki-Young, Lee, Chong-Mu


ALD법으로 제조된 Al2O3 박막의 물리적 특성

김재범, 권덕렬, 오기영, 이종무